CDSEM(線寬檢測)
欧美亚韩一区二区三区半導體專注於半導(dǎo)體工(gōng)藝設備的研發、製造、銷售及售(shòu)後一體化服務(wù),提供半(bàn)導體廠商工藝設備的一站式解(jiě)決方(fāng)案。
關鍵詞:
半導體設備(bèi)、半導體工藝
所屬分類(lèi):
產品描述
CD-SEMs (critical dimension scanning electron microscopes) are widely used as the main tool for CD measurement in semiconductor processes. In recent years they have helped in achieving improved precision for smaller design rules, and faster measurements for greater numbers of measurement points. New functions have also been implemented, such as automation of measurements through the effective utilization of design data, and measurement of hazardous locationss using positional information.
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